Porous silicon bulk micromachining for thermally isolated membrane formation

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 235-239

  Dücsö, Csaba ^a   Vázsonyi, Éva ^a   Ádám, Mária ^a   Szabó, Imre ^a   Barsony I Istvan ^a   Gardeniers, Johannes G E ^b   Van Den Berg, Albert ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Bulk micromachining; Membranes; Porous silicon

Indexed keywords

CHEMICAL SENSORS; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; MEMBRANES; NITRIDES; POROUS SILICON; POTASSIUM COMPOUNDS; SINGLE CRYSTALS; SUBSTRATES;

BULK MICROMACHINING; LOW PRESSURE CHEMICAL VAPOR DEPOSITION;

MICROMACHINING;

EID: 0031144956     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01384-8     Document Type: Article

References (5)

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