IR characterization of a-C:H:N films sputtered in Ar/CH4/N 2 plasma

Journal of Non-Crystalline Solids

Volumn 331, Issue 1-3, 2003, Pages 70-78

  Lazar, Gabriel ^a   Lazar, Iuliana ^a  

^a VASILE ALECSANDRI UNIVERSITY OF BACAU   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ARGON; GRAPHITE; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; NITROGEN; PARTIAL PRESSURE; PLASMAS;

AROMATIC STRUCTURES;

NONCRYSTALLINE SOLIDS;

EID: 0242569609     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2003.09.004     Document Type: Article

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