Fast deposition of amorphous carbon films by an expanding cascaded arc plasma jet

Journal of Applied Physics

Volumn 78, Issue 1, 1995, Pages 528-540

  Buuron, A J M ^a   Van De Sanden, M C M ^a   Van Ooij, W J ^b   Driessens, R M A ^a   Schram, D C ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF CINCINNATI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449003475     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360637     Document Type: Article

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