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Journal of Physics Condensed Matter

Volumn 13, Issue 13, 2001, Pages 3011-3021

Influence of the substrate-electrode applied bias voltage on the properties of sputtered a-C:H thin films

(1) Lazar, G a

a Bac u University (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ELECTRIC POTENTIAL; ELECTRODES; EMISSION SPECTROSCOPY; HYDROGEN BONDS; HYDROGENATION; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; THIN FILMS;

OPTICAL EMISSION SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 0035794625 PISSN: 09538984 EISSN: None Source Type: Journal
DOI: 10.1088/0953-8984/13/13/314 Document Type: Article

Times cited : (17)

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