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Thin Solid Films

Volumn 340, Issue 1, 1999, Pages 62-67

Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

(7) Yoon, S F a Rusli, a Ahn, J a Zhang, Q a Yang, C Y b Yang, H a Watt, F b

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AROMATIC COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CRYSTAL ATOMIC STRUCTURE; ELECTRON CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN BONDS; LIGHT ABSORPTION; OPTICAL VARIABLES MEASUREMENT; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ATOMIC CONCENTRATION; DELOCALIZATION OF CARRIERS; ELASTIC RECOIL DETECTION ANALYSIS; INFRARED ABSORPTION MEASUREMENT; POLYMERIC NITROGENATED AMORPHOUS CARBON FILMS; URBACH BAND;

DIAMOND FILMS;

EID: 0032647850 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01332-7 Document Type: Article

Times cited : (31)

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