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Volumn 332, Issue 1-2, 1998, Pages 62-68
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Vibrational properties of carbon nitride films by Raman spectroscopy
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Author keywords
Bonding structure; Carbon nitride; IR spectroscopy; Magnetron sputtering; Raman spectroscopy; Valence band spectra; Vibrational properties
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Indexed keywords
AMORPHOUS FILMS;
ANNEALING;
BAND STRUCTURE;
CARBON INORGANIC COMPOUNDS;
CERAMIC COATINGS;
CHEMICAL BONDS;
DIFFUSION IN SOLIDS;
MAGNETRON SPUTTERING;
MOLECULAR VIBRATIONS;
RAMAN SPECTROSCOPY;
SPUTTER DEPOSITION;
THIN FILMS;
BONDING STRUCTURE;
CARBON NITRIDE;
VALENCE BAND;
PROTECTIVE COATINGS;
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EID: 0032476326
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(98)00984-5 Document Type: Article |
Times cited : (158)
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References (33)
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