Structure and properties of carbon nitride films synthesized by low energy ion bombardment

Journal of Materials Research

Volumn 12, Issue 6, 1997, Pages 1595-1602

  He, Xiao Ming ^a   Shu, Li ^a   Li, Wen Zhi ^a   Li, Heng De ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; CRYSTAL STRUCTURE; FRICTION; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MATERIALS TESTING; SPUTTERING; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; WEAR TESTING;

NITRIDES;

EID: 0031164169     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.1997.0219     Document Type: Article

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