Correlation of deposition and IR properties of amorphous carbon nitride films

Surface and Coatings Technology

Volumn 115, Issue 2-3, 1999, Pages 95-102

  Liu, Y ^a   Jiaa, C ^a   Do, H ^a  

^a Stormedia Inc   (United States)

Author keywords

Amorphous carbon; Carbon nitride; IR optical properties

Indexed keywords

AMORPHOUS FILMS; CARBON INORGANIC COMPOUNDS; CONFORMATIONS; DOPING (ADDITIVES); INFRARED SPECTROSCOPY; NITRIDES; OPTICAL PROPERTIES; SPECTROMETERS; SPUTTER DEPOSITION;

CARBON NITRIDE;

PROTECTIVE COATINGS;

CARBONITRIDING; FILM; OPTICAL FEATURE;

EID: 0033581061     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00044-4     Document Type: Article

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