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Volumn 125, Issue 1-3, 2000, Pages 308-312

Chemical analysis of pulsed laser deposited a-CNx films by comparative infrared and X-ray photoelectron spectroscopies

Author keywords

Carbon nitride; Infrared (IR) absorption spectroscopy; Pulsed laser deposition; X ray photoelectron spectroscopy (XPS)

Indexed keywords

ABSORPTION SPECTROSCOPY; CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; DEPOSITION; INFRARED SPECTROSCOPY; LASER BEAM EFFECTS; NITRIDES; PRESSURE EFFECTS; PULSED LASER APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0034054395     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00580-0     Document Type: Article
Times cited : (66)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.