Preparation of thin films of carbon-based compounds

Applied Surface Science

Volumn 218, Issue 1-4, 2003, Pages 298-305

  Pan, W J ^a   Sun, J ^a   Ling, H ^a   Xu, N ^a   Ying, Z F ^a   Wu, J D ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Carbon based compound; Plasma assisted deposition; Pulsed laser deposition

Indexed keywords

BORON CARBIDE; CARBON NITRIDE; CHEMICAL BONDS; FILM PREPARATION; LASER ABLATION; PLASMA FLOW; PULSED LASER DEPOSITION; SINTERING; STOICHIOMETRY; VACUUM;

ATOMIC HYBRIDIZATION; PLASMA DEPOSITION;

THIN FILMS;

EID: 0043195800     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00622-6     Document Type: Article

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