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Volumn 142-144, Issue , 2001, Pages 889-893

Nitrogen incorporation into boron carbide films deposited by dc-magnetron sputtering: Film microstructure and tribological properties

Author keywords

Boron carbide; Density; Nitrogen; Partial pressure

Indexed keywords

ATOMIC FORCE MICROSCOPY; BORON; FILMS; FRICTION; NITROGEN; OXYGEN; PARTIAL PRESSURE; SURFACE ROUGHNESS;

EID: 0035386096     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01213-0     Document Type: Article
Times cited : (15)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.