|
Volumn 142-144, Issue , 2001, Pages 889-893
|
Nitrogen incorporation into boron carbide films deposited by dc-magnetron sputtering: Film microstructure and tribological properties
|
Author keywords
Boron carbide; Density; Nitrogen; Partial pressure
|
Indexed keywords
ATOMIC FORCE MICROSCOPY;
BORON;
FILMS;
FRICTION;
NITROGEN;
OXYGEN;
PARTIAL PRESSURE;
SURFACE ROUGHNESS;
AMORPHOUS BORON CARBIDE FILMS;
COATING TECHNIQUES;
BORON CARBIDE;
FILM;
MICROSTRUCTURE;
SPUTTERING;
TRIBOLOGY;
|
EID: 0035386096
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01213-0 Document Type: Article |
Times cited : (15)
|
References (24)
|