A comparative study of elastic recoil detection analysis (ERDA), electron energy loss spectroscopy (EELS) and X-ray photoelectron spectroscopy (XPS) for structural analysis of amorphous carbon nitride films

Diamond and Related Materials

Volumn 7, Issue 11-12, 1998, Pages 1727-1733

  Spaeth, C ^a   Kuhn M ^a   Richter, F ^a   Falke, U ^a   Hietschold, M ^a   Kilper, R ^b   Kreissig, U ^c  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF BASEL   (Switzerland)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

EELS; ERDA; Vacuum arc; XPS; C3N4

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC DENSITY OF STATES; FILM PREPARATION; STOICHIOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC RECOIL DETECTION ANALYSIS; ION BEAM ASSISTED FILTERED CATHODIC VACUUM ARC DEPOSITION; PLASMON LOSS;

DIAMOND FILMS;

EID: 0032288837     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00297-0     Document Type: Article

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