C:N and C:N:O films: Preparation and properties

Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 570-574

  Vorlicek V ^a   Siroky P ^b   Sobota, J ^c   Perina V ^d   Zelezny V ^a   Hrdina, J ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b HVM Plasma Ltd   (Czech Republic)

^c INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

^d INSTITUTE OF MATHEMATICS   (Czech Republic)

Author keywords

Adhesion; Carbon; Raman spectra; Sputtering

Indexed keywords

EID: 0042036807     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00366-5     Document Type: Article

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