Chemical vapour deposition of BC2N films and their laser-induced etching with SF6

Thin Solid Films

Volumn 312, Issue 1-2, 1998, Pages 99-105

  Popov, Cyril ^a,b   Saito, Kimitsugu ^a   Ivanov, Borislav ^c   Koga, Yoshinori ^a   Fujiwara, Shuzo ^a   Shanov, Vesselin ^c  

^a NATL INST OF MAT AND CHEM RES   (Japan)

^b CENTRAL LABORATORY OF PHOTOPROCESSES   (Bulgaria)

^c UNIVERSITY OF CHEMICAL TECHNOLOGY AND METALLURGY   (Bulgaria)

Author keywords

Chemical vapour deposition (CVD); Etching; Laser irradiation; Sulphur hexafluoride

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETCHING; LASER BEAM EFFECTS; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

BORON CARBON NITRIDE; SULFUR HEXAFLUORIDE;

SEMICONDUCTING FILMS;

EID: 0031700721     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00694-9     Document Type: Article

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