Boron carbide thin films deposited by tuned-substrate RF magnetron sputtering

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 402-405

  Pascual, E ^a   Martinez E ^a   Esteve, J ^a   Lousa, A ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Boron carbide; Hard coatings; Ion bombardment; Magnetron sputtering

Indexed keywords

AMORPHOUS FILMS; ARGON; BORON CARBIDE; FILM GROWTH; ION BOMBARDMENT; MAGNETRON SPUTTERING; MICROHARDNESS; OPTICAL PROPERTIES; RESIDUAL STRESSES; SPUTTER DEPOSITION; STOICHIOMETRY; THIN FILMS;

HARD COATINGS; SUBSTRATE TUNING TECHNIQUE;

PROTECTIVE COATINGS;

EID: 0032613757     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00274-x     Document Type: Article

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