Micromachining technologies for miniaturized communication devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 24-38

  Nguyen, Clark T C ^a  

^a University of Michigan   (United States)

Author keywords

Capacitor; Communications; Filter; Inductor; MEMS; Micromechanical; Q; Resonator; RF; Swi tch; Wireless

Indexed keywords

CAPACITANCE; CAPACITORS; EDDY CURRENTS; ELECTRIC FILTERS; ELECTRIC INDUCTORS; ELECTRIC RESISTANCE; FREQUENCIES; LIMITERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTOR SWITCHES; TELECOMMUNICATION EQUIPMENT; ANTENNAS; COMMUNICATION SYSTEMS; SWITCHES; ELECTRIC SWITCHES; RESONATORS; RADIO COMMUNICATION; WIRELESS TELECOMMUNICATION SYSTEMS;

FREQUENCY SELECTIVE DEVICES; MECHANICAL VIBRATING BEAMS; MICROMECHANICAL FILTERS; RADIO FREQUENCY DEVICES; MINIATURIZED COMMUNICATION DEVICES; FREQUENCY-SELECTIVE DEVICES;

MICROELECTRONIC PROCESSING; MICROMACHINING; MICROELECTROMECHANICAL DEVICES;

EID: 0038336269     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324302     Document Type: Conference Paper

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