Micromechanical electrostatic K-band switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 1998, Pages 1569-1572

  Pacheco, Sergio ^a   Nguyen, Clark T ^a   Katehi, Linda P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; SPRINGS (COMPONENTS); VOLTAGE MEASUREMENT;

CANTILEVER SPRINGS; MICROMECHANICAL ELECTROSTATIC SWITCHES; SERPENTINE SPRINGS;

ELECTRIC SWITCHES;

EID: 0031645672     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)