Characteristics of micromachined switches at microwave frequencies

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 1996, Pages 1141-1144

  Goldsmith, C ^a   Randall, J ^a   Eshelman, S ^a   Lin, T H ^a   Denniston, D ^a   Chen, S ^a   Norvell, B ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DIELECTRIC MATERIALS; ELECTRIC CONTACTS; ELECTRIC NETWORK TOPOLOGY; ELECTRIC RESISTANCE; ELECTROSTATICS; FREQUENCIES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROWAVE MEASUREMENT; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE;

CAPACITIVE MEMBRANE SWITCHES; ELECTRICAL SIGNALS; ELECTROSTATIC ACTUATION; ELECTROSTATICALLY ACTUATED CANTILEVER SWITCHES; MICROMACHINED SWITCHES; MICROMECHANICAL MEMBRANE SWITCHES; MICROWAVE FREQUENCIES;

SEMICONDUCTOR SWITCHES;

EID: 0029694266     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)