Geometric stress compensation for enhanced thermal stability in micromechanical resonators

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 945-948

  Hsu, Wan Thai ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NICKEL; STRESSES; THERMODYNAMIC STABILITY;

MICROMECHANICAL RESONATORS;

CRYSTAL RESONATORS;

EID: 0032265635     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)