Generic micromachined silicon platform for low-power, low-loss miniature transceivers

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 257-260

  Ziaie, Babak ^a   Kocaman, Namik K ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MICROMACHINING; MINIATURE INSTRUMENTS; OSCILLATORS (ELECTRONIC); SILICON;

MICROMACHINED SILICON PLATFORM;

TRANSCEIVERS;

EID: 0030652984     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)