CMOS Micromechanical Resonator Oscillator

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1993, Pages 199-202

  Nguyen, Clark T C ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTAL OSCILLATORS; MICROMECHANICAL RESONATORS; MICROMACHINING; RESONATORS; SILICON;

CLOSED-LOOP; DC BIAS VOLTAGE; MONOLITHICS; OSCILLATION AMPLITUDE; OSCILLATION FREQUENCY; PHASE NOISE PERFORMANCE; QUARTZ CRYSTAL OSCILLATORS; RESONATOR OSCILLATOR; STEADY STATE OSCILLATION; SURFACE MICROMACHINING TECHNOLOGY;

PHASE NOISE; CMOS INTEGRATED CIRCUITS;

CARRIER POWER; MICROMECHANICAL RESONATOR; PHASE NOISE;

EID: 0027845140     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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10. W. Yun, IEEE Solid-State Sensor & Actuator Workshop Tech. Digest, pp. 126-131, 1992.