Micro/nanotechnology for the satellite world

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 95-106

  Janson, Siegfried W ^a  

^a AEROSPACE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; ELECTRONS; MICROELECTROMECHANICAL DEVICES; TRANSISTORS;

MICROTECHNOLOGY;

NANOTECHNOLOGY;

EID: 0038059083     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476315     Document Type: Conference Paper

References (65)

1. K. Eric Drexler, "Machine-Phase Nanotechnology," Scientific American, pp. 74-75, 285, Sept. 2001.
2. Richard E. Smalley, "Of Chemistry, Love and Nanobots," Scientific American, pp. 76-77, 285, Sept. 2001.
3. George M. Whitesides and J Christopher Love, "The Art of Building Small," Scientific American, pp. 38-47, 285, Sept. 2001.
4. Gordon E. Moore, "Cramming More Components Onto Integrated Circuits," Electronics, pp. 114-117, 38 #8, April 1965.
5. Intel "Moore's Law" page, available online at http://www.intel.com/research/silicon/mooreslaw.htm. 2002.
6. International Semiconductor Roadmap Committee, "2001 International Technology Roadmap for Semiconductors: Executive Summary," online at http://public.itrs.net/Files/2001ITRS/ExecSum.pdf, 2001.
7. Jerome P. Silverman, "X-ray Lithography: Status, Challenges, and Outlook for 0.13 μm," J. Vac. Sci. Technol. B, pp. 2117-2124,15#6,Nov/Dec1997.
8. International SEMATECH, "1999 International Technology Roadmap for Semiconductors: 2000 Update; Front End Processes," available online at http://public.itrs.net/Files/2000UpdateFinal/FrontEndProcesses2000final.pdf
9. Yuan Taur and Edward J. Nowak, "CMOS Devices below 0.1 μm: How High Will Performace Go?," International Electron Devices Meeting Technical Digest, pp. 215-218, Washington D.C., Dec. 1997.
10. Shekhar Borkar, "Design Challenges of Technology Scaling," IEEE Micro, pp. 23-29,19 #4, July-Aug 1999.
11. Hon-Sum Philip et al., "Nanoscale CMOS," Proceedings of the IEEE, pp.537-570, 87 #4, April 1999.
12. Poalo Pavan et al., "Flash Memory Cells - An Overview," Proceedings of the IEEE, pp. 1248-1271, 85 #8, August 1997.
13. Haroon Ahmed, "Single Electron Electronics: Challenge for Nanofabrication," J. Vac. Sci. Technol. B, pp. 2101-2108, 15 #6, Nov/Dec 1997.
14. Konstantin K. Likharev, "Single-Electron Devices and Their Applications," Proc. IEEE, pp. 606-632, April 1999 Available online at: http://rsfq1.physics.sunysb.edu/̃likharev/nano/PIEE99.pdf
15. Konstantin K. Likharev and Tord Claeson, "Single Electronics," Scientific American, pp. 80-85, June 1992.
16. K.K.Likharev, "Single-electron devices and their applications," Proceedings of the IEEE, pp. 606-632, 87 #4, 1999.
17. James D. Meindl, Qiang Chen and Jeffrey A. Davis, "Limits on Silicon Nanoelectronics for Terascale Integration," Science, pp. 2044-2049, 293, Sept. 2001.
18. H.W.Ch. Postma, T. Teepen, Z. Yao, M. Grifoni, and C. Dekker, "Carbon nanotube single-electron transistors at room temperature," Science, pp. 76-79, 293 #5527, 2001.
19. A. Bachtold, P. Hadley, T. Nakanishi, and C. Dekker, "Logic circuits with carbon nanotube transistors," Science, pp. 1317-1320, 294 #5545, 2001.
20. Mark A. Reed and James M. Tour, "Computing with Molecules," Scientific American, pp. 86-93, 282 #6, June 2000.
21. European Space Agency, Space Environment Information System, online at: http://www.spenvis.oma.be/spenvis/
22. A.C. Tribble et al., section 8.1 "The Space Environment," in Space Mission Analysis and Design, 3rd Edition by Wiley J. Larson and James R. Wertz, pp.203-221, Microcosm, Inc, Torrance CA, USA, 1995.
23. Ronald C. Lacoe et al., "Application of Hardness-By-Design Methodology to Radiation-Tolerant ASIC Technologies," IEEE Trans. On Nuc. Sci., pp. 2334-2341, 47 #6, Dec. 2000.
24. J.V. Osborn et al., "Total Dose Hardness of Three Commercial CMOS Foundries," IEEE Trans. On Nuc, Sci., p. 1458, 45, 1998.
25. rd edition, ed. by James Wertz and Wiley Larsen, Microcosm Press Torrance, CA, 1999.
26. H.-S. P. Wong, D. J. Frank, P. M. Solomon, H.-J. Wann, and J. Welser, "Nanoscale CMOS," Proceedings of the IEEE, pp. 537-570, 87 #4, April 1999.
27. Marc Madou, Fundamentals of Microfabrication. CRC Press, New York, 1997.
28. Proceedings of the IEEE, Special Issue on Integrated Sensors, Microactuators, & Microsystems (MEMS), 86 #8, August 1998.
29. Gregory T.A. Kovacs, Nadim I. Maluf and Kurt E. Petersen, "Bulk Micromachining of Silicon," Proceedings of the IEEE, pp.1536-1551, 86 #8, August 1998.
30. K.D. Bean, "Anisotropic Etching of Silicon," IEEE Transactions on Electron Devices, p. 1185, ED-25, 1978.
31. D.B. Lee, "Anisotropic Etching of Silicon," J. Appl. Phys., p. 4569, 40, 1969.
32. M.P. Wu, Q.H. Wu, and W.H. Ko, "A Study on Deep Etching of Silicon Using Ethylenediamine-Pyrocatechol-Water," Sensors and Actuators, p. 333, 9, 1986.
33. O. Tabata et al., Technical Digest, Transducers '91; IEEE Int. Conf. On Solid-State Sensors and Actuators, p. 811, 1991.
34. J.B. Angell et al., "Silicon Micromechanical Devices," Scientific American, p.44-55, 248 #4, April 1983.
35. th IEEE International Conference on Micro Electro Mechanical Systems, pp. 211-216, January 17-21, 1999.
36. James M. Bustillo, Roger T. Howe and Richard S. Muller, "Surface Micromachining for Microelectromechanical Systems," Proceedings of the IEEE, pp. 1552-1574, 86 #8, August 1998.
37. Clark T.-C. Nguyen, "Micromechanical circuits for communication transceivers," Proceedings of the 2000 Bipolar/BiCMOS Circuits and Technology Meeting (BCTM), pp. 142-149, Minneapolis, Minnesota, September 25-26, 2000.
38. Clark T.-C. Nguyen, "Vibrating RF MEMS for low power wireless communications," Proceedings of the 2000 Int. MEMS Workshop (iMEMS'0l), pp. 21-34, Singapore, July 4-6, 2001.
39. Eyal Buks and Michael L. Roukes, "Casimir Force Changes Sign," Nature, pp. 119-120, 419, September 12, 2002.
40. U. Mohideen and Anushree Roy, "Precision Measurement of the Casimir Force from 0.1 to 0.9 μm," Phys Rev Lett, pp. 4549-4552, 81 # 21 November 23, 1998.
41. J.S. Aldridge, R.S. Knobel, D.R. Schmidt, C.S. Yung and A.N. Cleland, "Nanoelectronic and Nanomechanical Systems", SPIE Proceedings 4591, 11 (2001).
42. H. Helvajian and S. W. Janson, "Microengineering Space Systems," Chapter 2 in Microengineering Aerospace Systems, edited by H. Helvajian, pp. 29-72, AIAA, Reston, VA, 1999.
43. H. Helvajian, editor, Microengineering Technology for Space Systems, Aerospace Press, El Segundo, CA, and AIAA, Reston, VA, 1995.
44. H. Helvajian and E.Y. Robinson, editors, Micro- and Nanotechnology for Space Systems, Aerospace Press, El Segundo, CA, and AIAA, Reston, VA, 1993.
45. W.C. Tang, "Micromechanical Devices at JPL for Space Exploration," IEEE 1998 Aerospace Conference, Aspen, Colorado, March 21-28, 1998.
46. H. Helvajian, S. Janson, and E.Y. Robinson, "Big Benefits from Tiny Technologies: Micro-Nanotechnology Applications in Future Space Systems," p. 3-34 in Advancement of Photonics for Space, ed. by E.W. Taylor, CR66, Crit. Rev. of Opt. Sci. and Tech., SPIE Press, Bellingham, WA, 1997.
47. A.M. de Aragon et al., "Micro/Nano-Technologies for Space," Round Table at ESTEC, European Space Agency Report ESA WPP-091, March 1995.
48. Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications, Houston, Texas, Oct. 30-Nov. 3, 1995, Aerospace Press, El Segundo, CA., 1995.
49. S.W.Janson, "Spacecraft As An Assembly of ASIMS," p. 181-258 in Microengineering Technology for Space Systems, ed. by H. Helvajian, Aerospace Corporation Report Number ATR-95(8168)-2, September 1995.
50. Agilent HDCS-1020, HDCS-2020 CMOS Image Sensors Data Sheet, available online at: http://literature.agilent.com/litweb/pdf/5988-2062EN.pdf
51. C.C. Liebe, S. Mobasser, Y. Bae, C.J. Wrigley, J.R. Schroeder and A. M. Howard, "Micro Sun Sensor," Paper 274, Proceedings of the 2002 IEEE Aerospace Conference, Big Sky Montana, March 9-16,2002.
52. E. Socher et al., "Optimal Performance of CMOS Compatible IR Thermoelectric Sensors" Journal of Microelectromechanical Systems, pp. 38-46, 9, March 2000.
53. M. Schneider et al., "High Sensitivity CMOS MicroFluxgate Sensor," International Electron Devices Meeting Technical Digest, pp. 907-910, Washington D.C., Dec. 1997.
54. HMC1001/1002/1021/1022 data sheet, Honeywell Solid State Electronics Center, available online at: http://www.ssec.honeywell.com:80/magnetic/datasheets/hmcl001-2 1021-2.pdf
55. D.K. Wickenden, R.B. Givens, R. Osiander, J.L. Champion, D.A. Oursler and T.J. Kistenmacher, "MEMS-based Resonating Xylophone Bar Magnetometer," Paper 3514-34, Proceedings SPIE Micromachined Devices and Components IV, Volume 3514, Santa Clara, CA, September 20-24, 1998.
56. th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, January 20-24, 2002.
57. D.H. Lewis, S.W. Janson, R.B. Cohen, and E.K. Antonsson, "Digital MicroPropulsion," Proceedings of the 12th IEEE International Micro Electro Mechanical Systems Conference, Orlando, FL, Jan 17-21, 1999.
58. M. Martinez-Sanchez and J. E. Pollard, "Spacecraft Electric Propulsion: An Overview," Journal of Propulsion and Power, pp. 688-699,14 #5, September-October 1998.
59. th International Vacuum Microelectronics Conference, pp.123-124, August 12-16, 2001.
60. K.L. Jensen, R.H. Abrams, and R.K. Parker, "Field Emitter Array Development for High Frequency Applications," Journal Vac. Sci. Technol. B, 16 #2, pp. 749-753, 1998.
61. C.A. Spindt, C.E. Holland, P.R. Schwoebel, and I. Brodie, "Field Emitter Array Development for Microwave Applications: II," Journal Vac. Sci. Technol. B, 16 #2, pp. 758-761, 1998.
62. C.A. Spindt, "Microfabricated field-emission and field-ionization sources," Surface Science, 266, pp.145-154,1992.
63. S.J. Kwon, Y.H. Shin, D.E. Aslam, and J.D. Lee, "Field Emission Properties of the Polycrystalline Diamond Film Prepared by Microwave-Assisted Plasma Chemical Vapor Deposition," Journal Vac. Sci. Technol. B, 16 #2, pp. 712-715, 1998.
64. S. Iannazzo, "A Survey of the Present Status of Vacuum Microelectronics," Solid State Electronics, 36 #3, pp.301-320,1993.
65. th International Vacuum Microelectronics Conference, pp.137-138, August 12-16, 2001.