Micromachined CMOS magnetic field sensors with low-noise signal conditioning

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 256-259

  Beroulle, Vincent ^a   Bertrand, Yves ^a   Latorre, Laurent ^a   Nouet, Pascal ^a  

^a LIRMM   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ETCHING; FERROMAGNETIC MATERIALS; INTEGRATED CIRCUIT LAYOUT; MAGNETIC FIELD MEASUREMENT; MAGNETIC FIELDS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SPURIOUS SIGNAL NOISE;

BEAM BENDING; FRONT SIDE BULK MICROMACHINING; LORENTZ FORCE; MAGNETIC FIELD SENSORS; PIEZORESISTIVE POLYSILICON GAUGES; SENSOR RESOLUTION; WET ETCHING;

SENSORS;

EID: 0036122132     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984251     Document Type: Article

References (5)

1. Offset in CMOS magnetotransistors
2. Characterization and modeling of a CMOS-compatible MEMS technology
3. Magnetic microactuation of torsional polysilicon structures