MEMS-based resonating xylophone bar magnetometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3514, Issue , 1998, Pages 350-358

  Wickenden, D K ^a   Givens, R B ^a   Osiander, R ^a   Champion, J L ^a   Oursler, D A ^a   Kistenmacher, T J ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRODES; ELECTROSTATICS; MAGNETIC FIELD MEASUREMENT; MAGNETOMETERS; MILLING (MACHINING); PIEZOELECTRIC DEVICES; POLYCRYSTALLINE MATERIALS;

XYLOPHONE BARS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032302211     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)