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Volumn 293, Issue 5537, 2001, Pages 2044-2049
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Limits on silicon nanoelectronics for terascale integration
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Author keywords
[No Author keywords available]
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Indexed keywords
LSI CIRCUITS;
MOS DEVICES;
NANOSTRUCTURED MATERIALS;
SEMICONDUCTING SILICON;
SILICON CHANNEL;
ELECTRONIC EQUIPMENT;
METAL OXIDE;
NANOPARTICLE;
SILICON;
DEVICE;
DIELECTRIC CONSTANT;
ELECTROMAGNETIC FIELD;
ELECTRONICS;
INTEGRATED CIRCUIT;
MATERIALS;
PHYSICS;
PRIORITY JOURNAL;
QUANTUM MECHANICS;
REVIEW;
SEMICONDUCTOR;
SYSTEM ANALYSIS;
TECHNOLOGY;
THERMODYNAMICS;
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EID: 0035860451
PISSN: 00368075
EISSN: None
Source Type: Journal
DOI: 10.1126/science.293.5537.2044 Document Type: Review |
Times cited : (348)
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References (20)
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