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Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 64, Issue 2 II, 2001, Pages 264061-2640610

Lorentz force effects on the electron energy distribution in inductively coupled plasmas

(3) Godyak, V A a Alexandrovich, B M a Kolobov, V I a

a OSRAM SYLVANIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ELECTRON ENERGY ANALYZERS; ELECTRONS; MAGNETIC FIELD EFFECTS; PLASMA COLLISION PROCESSES; PRESSURE EFFECTS; SKIN EFFECT; THERMAL EFFECTS;

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); INDUCTIVELY COUPLED PLASMA;

PLASMA INTERACTIONS;

EID: 0037722067 PISSN: 15393755 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (41)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.