Hot plasma and nonlinear effects in inductive discharges *

Physics of Plasmas

Volumn 6, Issue 5 I, 1999, Pages 1804-1812

  Godyak, V A ^a   Piejak, R B ^a   Alexandrovich, B M ^a   Kolobov, V I ^b  

^a OSRAM SYLVANIA   (United States)

^b CFD RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001654894     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.873438     Document Type: Article

References (29)

1. I. Langmuir and L. Tonks, Phys. Rev. 33, 1995 (1929).
2. I. Merrill and N. W. Webb, Phys. Rev. 55, 1191 (1939).
3. A. A. Vlasov, Zh. Eksp. Teor. Fiz. 7, 203 (1938).
4. L. D. Landau, Zh. Eksp. Teor. Fiz. 16, 574 (1946).
5. Electron Kinetics and Applications of Glow Discharges, edited by U. Kortshagen and L. Tsendin (Plenum, New York, 1998), pp. 215-328.
6. V. A. Godyak and A. A. Kuzovnikov, Sov. J. Plasma Phys. 1, 276 (1975).
7. V. A. Godyak, Sov. Phys. Tech. Phys. 16, 1073 (1972).
8. C. G. Goedde, A. J. Lichtenberg, and M. A. Lieberman, J. Appl. Phys. 64, 4375 (1988).
9. Z. Wang, A. J. Lichtenberg, and R. H. Cohen, IEEE Trans. Plasma Sci. 26, 59 (1998).
10. R. A. Demirkhanov, I. Ya. Kadish, and Yu. S. Khodyrev, Sov. Phys. JETP 19, 791 (1964).
11. E. S. Weibel, Phys. Fluids 10, 741 (1967).
12. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994), pp. 390, 555.
13. M. M. Turner, Phys. Rev. Lett. 71, 1844 (1993).
14. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 3, 169 (1994).
15. V. Vahedi, M. A. Lieberman, G. DiPeso, T. D. Rognlien, and D. Hewett, J. Appl. Phys. 78, 1446 (1995).
16. N. S. Yoon, S. S. Kim, C. S. Chang, and Duk-In Choi, Phys. Rev. E 54, 757 (1996).
17. I. D. Kaganovich, V. I. Kolobov, and L. D. Tsendin, Appl. Phys. Lett. 69, 3818 (1996).
18. Yu. M. Aliev, I. D. Kaganovich, and H. Schluter, Phys. Plasmas 4, 2413 (1997).
19. V. I. Kolobov and D. J. Economou, Plasma Sources Sci. Technol. 6, R1 (1997).
20. M. A. Lieberman and V. A. Godyak, IEEE Trans. Plasma Sci. 26, 955 (1998).
21. V. A. Godyak, in Electron Kinetics and Applications of Glow Discharges, edited by U. Kortshagen and L. Tsendin, (Plenum, New York, 1998), p. 241.
22. V. A. Godyak, Invited Paper at Fourteenth European Conference on the Atomic and Molecular Physics, (European Physical Society, Petit-Lancy 1996) edited by P. Lukac, I. Kozinar, and J. Skalny, Vol. 20E, Part A. Bratislava, Slovakia, 1996, pp. IX-XII.
23. V. A. Godyak and R. B. Piejak, J. Appl. Phys. 82, 5944 (1997).
24. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, J. Appl. Phys. 81, 3416 (1997).
25. H. A. Blevin, J. A. Reynolds, and P. C. Thonemann, Phys. Fluids 13, 1259 (1970).
26. V. A. Godyak, R. B. Piejak, B. M. Alexandrovich, and V. I. Kolobov, Phys. Rev. Lett. 80, 3264 (1997).
27. V. A. Godyak and V. I. Kolobov, Phys. Rev. Lett. 79, 4589 (1997).
28. H. A. Blevin, J. A. Reynolds, and P. C. Thonemann, Phys. Fluids 16, 82 (1973).
29. R. H. Cohen and T. D. Rognlien, Phys. Plasmas 3, 1839 (1996).