Nonlinear radio-frequency potential in an inductive plasma

Plasma Sources Science and Technology

Volumn 9, Issue 4, 2000, Pages 541-544

  Godyak, V ^a   Alexandrovich, B ^a   Piejak, R ^a   Smolyakov, A ^b  

^a OSRAM SYLVANIA   (United States)

^b UNIVERSITY OF SASKATCHEWAN   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; HALL EFFECT; HARMONIC ANALYSIS;

INDUCTIVELY COUPLED PLASMAS (ICPS); LORENTZ FORCE;

PLASMAS;

EID: 0034321415     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/4/309     Document Type: Article

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