The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma

Physics of Plasmas

Volumn 7, Issue 9, 2000, Pages 3584-3587

  Chung, Chinwook ^a   Seo, Sang Hun ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001554295     PISSN: 1070664X     EISSN: 10897674     Source Type: Journal    
DOI: 10.1063/1.1286804     Document Type: Article

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