Nonlocal electron kinetics in a planar inductive helium discharge

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 62, Issue 5, 2000, Pages 7155-7167

  Seo, Sang Hun ^a   Chung, Chin Wook ^a   Hong, Jung In ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ELECTRON ENERGY LEVELS; ELECTRON RESONANCE; HELIUM; MONTE CARLO METHODS; PLASMAS;

ELECTRON COLLISIONS; ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); HELIUM DISCHARGE; INDUCTIVE PLASMAS;

KINETIC THEORY;

EID: 0034317038     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.62.7155     Document Type: Article

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