Electron kinetics and non-Joule heating in near-collisionless inductively coupled plasmas

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 55, Issue 3, 1997, Pages 3408-3422

  Kolobov, V I ^a   Lymberopoulos, D P ^b   Economou, D J ^a  

^a University of Houston   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000036711     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.55.3408     Document Type: Article

References (38)

1. M A. Lieberman and A J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
2. H U. Eckert, in Proceedings of the Second International Conference on Plasma Chemical Technology, San Diego, 1984, edited by H. V. Boenig (Technomic, Lancaster, 1986).
3. V I. Kolobov and W. N. G. Hitchon, Phys. Rev. E52, 972 (1995).
4. U. Kortshagen, I. Pukropski and L D. Tsendin, Phys. Rev E51, 6063 (1995).
5. V I. Kolobov, G J. Parker and W. N. G. Hitchon, Phys. Rev. E53, 1110 (1996).
6. V A. Godyak, Zh. Tekh. Fiz.41, 1364 (1971) [Sov. Phys. Tech. Phys. 16, 1073 (1972)].
7. C E. Goedde, A J. Lichtenberg and M A. Lieberman, J. Appl. Phys.64, 4375 (1988).
8. J. Hopwood, C R. Guarnieri, S J. Whitehair and J J. Cuomo, J. Vacuum Sci. Technol.11, 147 (1993).
9. V A. Godyak, R B. Piejak and B M. Alexandrovich, Plasma Sources Sci. Technol.3, 169 (1994).
10. M M. Turner, Plasma Sources Sci. Technol.5, 159 (1996).
11. V. Vahedi, M A. Lieberman, G. DiPeso, T D. Rognlien, and D. Hewett, J. Appl. Phys.78, 1446 (1995).
12. H A. Blevin, J A. Reinolds and P C. Thonemann, Phys. Fluids16, 82 (1973).
13. I D. Kaganovich, V I. Kolobov and L D. Tsendin, Appl. Phys. Lett.69, 3818 (1996).
14. R A. Demirkhanov, I. Ya. Kadysh and Yu. S. Khodyrev, Zh. Eksp. Teor. Fiz.46, 1169 (1964) [Sov. Phys. JETP 19, 791 (1964)].
15. R H. Cohen and T D. Rognlien, Plasma Sources Sci. Technol.5, 442 (1996).
16. M R. Gibbons and D W. Hewett, J. Comput. Phys.120, 231 (1995).
17. H A. Blevin, J M. Greene, D L. Jolly and R G. Storer, J. Plasma Phys.10, 337 (1973).
18. V I. Kolobov and D J. Economou, Plasma Sources Sci. Technol. (to be published).
19. K. Henjes, J. Appl. Phys.79, 21 (1995).
20. K. Chandrakar, J. Phys. D11, 1809 (1978).
21. G. Schmidt, The Physics of High-Temperature Plasmas (Addison-Wesley, Reading, MA, 1966).
22. E S. Weibel, Phys. Rev.114, 18 (1959).
23. R Z. Sagdeev, D A. Usikov, and G M. Zaslavsky, Nonlinear Physics from the Pendulum to Turbulence and Chaos (Harwood Academic, Chur, Switzerland, 1988).
24. A J. Lichtenberg and M A. Lieberman, Regular and Chaotic Dynamics (Springer-Verlag, New York, 1992).
25. V L. Ginzburg and A V. Gurevich, Usp. Fiz. Nauk70, 201 (1960) [Sov. Phys. Usp. 3, 115 (1960)].
26. L D. Tsendin and Yu. B. Golubovskii, Zh. Tekh. Fiz.47, 1839 (1977) [Sov. Phys. Tech. Phys. 22, 1066 (1977)].
27. I D. Kaganovich and L D. Tsendin, IEEE Trans. Plasma Sci.20, 86 (1992).
28. V A. Godyak, R B. Piejak, and B M. Alexandrovich, in Proceedings of the ICOPS'96, Boston, 1996 (IEEE, 1996).
29. R W. Hockney and J W. Easwood, Computer Simulation using Particles (Hilger, Bristol, 1988).
30. C K. Birdsall and A B. Langdon, Plasma Physics via Computer Simulation (McGraw-Hill, New York, 1985).
31. D P. Lymberopoulos and J D. Shieber, Phys. Rev. E50, 4911 (1994).
32. D P. Lymberopoulos and D J. Economou, J. Phys. D28, 727 (1995).
33. H R. Skulerud, J. Phys. D25, 1567 (1968).
34. Y. Weng and M J. Kushner, Phys. Rev. A42, 6192 (1990).
35. G A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Oxford Science, New York, 1994).
36. V I. Kolobov and V A. Godyak, IEEE Trans. Plasma Sci.23, 503 (1995).
37. V A. Godyak and R B. Piejak, Phys. Rev. Lett.65, 996 (1990).
38. U. Buddemeier, U. Kortschagen and I. Pukropski, Appl. Phys. Lett.67, 191 (1995).