Spatial profiles of a planar inductively coupled discharge in argon

Journal of Physics D: Applied Physics

Volumn 32, Issue 7, 1999, Pages 804-814

  Mumken G ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMA ETCHING;

ELECTRON DISTRIBUTION FUNCTION; LANGMUIR PROBE MEASUREMENT; PLASMA POTENTIAL;

ARGON;

EID: 0345440137     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/7/009     Document Type: Article

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