Properties of the SiO2/SiC interface investigated by angle resolved studies of the Si 2p and Si 1s levels and the Si KLL Auger transitions

Surface Science

Volumn 529, Issue 3, 2003, Pages 515-526

  Johansson, L I ^a   Virojanadara, C ^a   Eickhoff, Th ^b   Drube, W ^c  

^a LINKÖPING UNIVERSITY   (Sweden)

^b UNIVERSITY OF HAMBURG   (Germany)

^c DESY   (Germany)

Author keywords

Angle resolved photoemission; Auger electron spectroscopy; Oxidation; Silicon; Silicon carbide; Silicon oxides

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; INTERFACES (MATERIALS); OXIDATION; PHASE TRANSITIONS; SILICA; SILICON CARBIDE;

ANGLE RESOLVED PHOTOEMISSION;

SURFACE CHEMISTRY;

EID: 0037430958     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(03)00337-6     Document Type: Article

References (30)

1. Hornetz B., Michel H.-J., Halbritter J. J. Mater. Res. 9:1994;3088.
2. Afanasev V.V., Bassler M., Pensel G., Schultz M.J. Phys. Status Solidi A. 162:1997;321.
3. Li H.F., Dimitrijev S., Sweatman D., Harrison H.B., Tanner P., Feil B. J. Appl. Phys. 86:1999;4316.
4. Amy F., Soukiassian P., Hwu Y.K., Brylinski C. Appl. Phys. Lett. 75:1999;3360.
5. Chang K.C., Nuhfer N.T., Porter L.M., Wahab Q. Appl. Phys. Lett. 77:2000;2186.
6. Simon L., Kubler K., Ermolieff A., Billon T. Phys. Rev. B. 60:1999;5673.
7. Hollering M.et al. Surf. Sci. 442:1999;531.
8. Di Ventra M., Pantelides S. Phys. Rev. Lett. 83:1999;1624.
9. Buczko R., Pennycook S.J., Pantelides S. Phys. Rev. Lett. 84:2000;943.
10. Virojanadara C., Glans P.-A., Johansson L.I., Eickhoff Th., Drube W. Appl. Surf. Sci. 172:2001;253.
11. Virojanadara C., Johansson L.I. Surf. Sci. 472:2001;L145.
12. Amy F., Enriquez H., Soukiassian P., Storino P.-F., Chabal Y.J., Mayne A.J., Dujardin G., Hwu Y.K., Brylinski C. Phys. Rev. Lett. 86:2001;4342.
13. Virojanadara C., Johansson L.I. Surf. Sci. 505:2002;358.
14. Amy F., Soukiassian P., Hwu Y.K., Brylinski C. Phys. Rev. B. 65:2002;165323.
15. Hoshino Y., Nishimura T., Yoneda T., Ogawa K., Namba H., Kido Y. Surf. Sci. 505:2002;234.
16. Iwata S., Ishizaka A. J. Appl. Phys. 79:1996;6653. and references therein.
17. Weldon M.K., Queeney K.T., Eng J. Jr., Raghavachari K., Chabal Y.J. Surf. Sci. 500:2002;859.
18. Luth D.-A., Miller T., Chiang T.-C. Phys. Rev. Lett. 79:1997;3014.
19. Jensen B.N., Butorin S.M., Kaurila T., Nyholm R., Johansson L.I. Nucl. Instr. Meth. A. 394:1997;243.
20. Drube W., Schulte-Schrepping H., Schmidt H.-G., Treusch R., Materlik G. Rev. Sci. Instr. 66:1995;1668.
21. Drube W., Grehk T.M., Treusch R., Materlik G. J. Electron Spectrosc. Relat. Phenom. 88-89:1998;683.
22. Johansson L.I., Owman F., Mårtensson P. Phys. Rev. B. 53:1996;13793.
23. Johansson L.I., Owman F., Mårtensson P. Surf. Sci. 360:1996;L484.
24. Mahowald P.H., Friedman D.J., Carey G.P., Bertness K.A., Yeh J.J. J. Vac. Sci. Technol. A. 5:1987;2982.
25. Tautz F.S., Sloboshanin S., Starke U., Schaefer J.A. Surf. Sci. 470:2000;L25.
26. Cumpson P.J., Seah M.P. Surf. Int. Anal. 25:1997;430.
27. Browning R., Sobolewski M.A., Helms C.R. Phys. Rev. B. 38:1998;13407.
28. Pasquarello A., Hybertsen M.S., Car R. Phys. Rev. Lett. 74:1995;1024.
29. Hohlneicher G., Pulm H., Freund H.-J. J. Electron Spectrosc. 37:1985;209.
30. T. Eickhoff, W. Drube, unpublished.