High-carbon concentrations at the silicon dioxide-silicon carbide interface identified by electron energy loss spectroscopy

Applied Physics Letters

Volumn 77, Issue 14, 2000, Pages 2186-2188

  Chang, K C ^a   Nuhfer, N T ^a   Porter, L M ^a   Wahab, Q ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001476866     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1314293     Document Type: Article

References (19)

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