Effect of laser fluences on the structure of carbon nitride films deposited by direct current plasma assisted pulsed laser ablation

Surface and Coatings Technology

Volumn 160, Issue 2-3, 2002, Pages 269-276

  Cheng, Y H ^a,d   Qiao, X L ^a   Chen, J G ^a   Wu, Y P ^a   Xie, C S ^a   Wang, Y Q ^a   Xu, D S ^a   Mo, S B ^b   Sun, Y B ^c  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b WUHAN UNIVERSITY   (China)

^c WUHAN UNIVERSITY OF TECHNOLOGY   (China)

^d CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Carbon nitride films; FTIR spectroscopy; Laser ablation deposition; Laser fluence; XPS

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; LASER ABLATION; RAMAN SCATTERING; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

CURRENT PLASMAS;

SURFACES;

CARBON NITRIDE; FILM; HARDNESS; LASER; PLASMA TREATMENT; WEAR RESISTANCE;

EID: 0037159173     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00395-X     Document Type: Article

References (42)