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Volumn 10, Issue 12, 2001, Pages 2137-2144

Influence of nitrogen ion energy on the Raman spectroscopy of carbon nitride films

Author keywords

Carbon nitride films; Filtered cathodic vacuum arc; Raman spectroscopy

Indexed keywords

CHEMICAL BONDS; DEPOSITION; FILMS; ION BEAMS; NITROGEN; RAMAN SPECTROSCOPY; ULTRAVIOLET SPECTROSCOPY; VACUUM APPLICATIONS;

EID: 0035577539     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00499-X     Document Type: Article
Times cited : (25)

References (38)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.