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Volumn 10, Issue 12, 2001, Pages 2137-2144
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Influence of nitrogen ion energy on the Raman spectroscopy of carbon nitride films
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Author keywords
Carbon nitride films; Filtered cathodic vacuum arc; Raman spectroscopy
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Indexed keywords
CHEMICAL BONDS;
DEPOSITION;
FILMS;
ION BEAMS;
NITROGEN;
RAMAN SPECTROSCOPY;
ULTRAVIOLET SPECTROSCOPY;
VACUUM APPLICATIONS;
CARBON NITRIDE FILMS;
CARBON NITRIDE;
CARBON NITRIDE;
CATHODIC ARC PLASMA DEPOSITION;
DIAMOND COATING;
FILM;
SPECTROSCOPY;
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EID: 0035577539
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00499-X Document Type: Article |
Times cited : (25)
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References (38)
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