The effect of implantation temperature on the surface hardness, elastic modulus and Raman scattering in amorphous carbon

Applied Physics Letters

Volumn 70, Issue 23, 1997, Pages 3104-3106

  Lee, Deok Hyung ^a   Lee, Hyukjae ^a   Park, Byungwoo ^a   Poker, David B ^b   Riester, Laura ^b  

^a Georgia Institute of Technology   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000826562     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119092     Document Type: Article

References (18)

1. A. Y. Liu and M. L. Cohen, Phys. Rev. B 41, 10727 (1990); M. L. Cohen, ibid. 32, 7988 (1985).
2. A. Y. Liu and M. L. Cohen, Phys. Rev. B 41, 10727 (1990); M. L. Cohen, ibid. 32, 7988 (1985).
3. D. Li, X. W. Lin, S. C. Cheng, V. P. Dravid, Y. W. Chung, M. S. Wong, and W. D. Sproul, Appl. Phys. Lett. 68, 1211 (1996).
4. Z. J. Zhang, S. Fan, J. Huang, and C. M. Lieber, Appl. Phys. Lett. 68, 2639 (1996).
5. H. Sjöström, S. Stafström, M. Boman, and J. E. Sundgren, Phys. Rev. Lett. 75, 1336 (1995).
6. D. H. Lee, B. Park, D. B. Poker, L. Riester, Z. C. Feng, and J. E. E. Baglin, J. Appl. Phys. 80, 1480 (1996); D. H. Lee, H. Lee, and B. Park, J. Mater. Res. (in press).
7. D. H. Lee, B. Park, D. B. Poker, L. Riester, Z. C. Feng, and J. E. E. Baglin, J. Appl. Phys. 80, 1480 (1996); D. H. Lee, H. Lee, and B. Park, J. Mater. Res. (in press).
8. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992).
9. M. F. Doerner and W. D. Nix, J. Mater. Res. 1, 601 (1986).
10. D. S. Knight and W. B. White, J. Mater. Res. 4, 385 (1989).
11. F. Parmigiani, E. Kay, and H. Seki, J. Appl. Phys. 64, 3031 (1988).
12. D. G. McCulloch and S. Prawer, J. Appl. Phys. 78, 3040 (1995); D. G. McCulloch, S. Prawer, and A. Hoffman, Phys. Rev. B 50, 5905 (1994).
13. D. G. McCulloch and S. Prawer, J. Appl. Phys. 78, 3040 (1995); D. G. McCulloch, S. Prawer, and A. Hoffman, Phys. Rev. B 50, 5905 (1994).
14. R. Sizmann, J. Nucl. Mater. 69/70, 386 (1978).
15. B. Park, F. Spaepen, J. M. Poate, D. C. Jacobson, and F. Priolo, J. Appl. Phys. 68, 4556 (1990).
16. K. A. Jackson, J. Mater. Res. 3, 1218 (1988).
17. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. Lett. 62, 1290 (1989); Y. Lifshitz, G. D. Lempert, and E. Grossman, ibid. 72, 2753 (1994).
18. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. Lett. 62, 1290 (1989); Y. Lifshitz, G. D. Lempert, and E. Grossman, ibid. 72, 2753 (1994).