Infrared analysis of deuterated carbon-nitrogen films obtained by dual-ion-beam-assisted-deposition

Applied Physics Letters

Volumn 73, Issue 8, 1998, Pages 1065-1067

  Alvarez, F ^a   Victoria, N M ^a   Hammer, P ^a   Freire Jr , F L ^a   Dos Santos, M C ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21544456105     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122115     Document Type: Article

References (22)

1. D. F. Franceschini, C. A. Achete, and F. L. Freire, Jr., Appl. Phys. Lett. 60, 3229 (1992);
2. D. I. Jones and A. D. Stewart, Philos. Mag. 46, 423 (1982).
3. A. Liu and L. Cohen, Science 245, 841 (1989).
4. O. Amir and R. Kalish, J. Appl. Phys. 70, 4958 (1991).
5. A. Mansour and D. Ugolini, Phys. Rev. B 47, 10201 (1993).
6. S. Souto and Alvarez, Appl. Phys. Lett. 70, 1539 (1997).
7. S. Prek, J. Weidman, and F. Glatz, J. Vac. Sci. Technol. A 13, 2914 (1995).
8. S. Kumar and T. L. Tansley, Thin Solid Films 256, 44 (1994).
9. H-X. Hang and B. J. Feldman, Solid State Commun. 65, 921 (1988).
10. S. Liu, S. Gangopadhyay, G. Sreenivas, S. S. Ang, and H. A. Naseem, Phys. Rev. B 55, 13020 (1997).
11. N. B. Colthup, L. H. Daly, and S. E. Wiberley, Introduction to Infrared and Raman Spectroscopy (Academic, New York, 1964).
12. K. Nakanishi and P. H. Solomon, Infrared Absorption Spectroscopy, 2nd ed. (Holden-Day, San Francisco, CA, 1977).
13. P. Hammer, N. M. Victoria, and F. Alvarez, J. Vac. Sci. Technol. (to be published).
14. P. Hammer, N. M. Victoria, and F. Alvarez, J. Non-Cryst. Solids 227-230, 645 (1998).
15. J. Schäfer, J. Ristein, R. Graupner, L. Ley, U. Stephan, Th. Frauenhein, V. S. Verasamy, G. A. Amaratunga, M. Weiler, and H. Ehrhardt, Phys. Rev. B 12, 7762 (1996).
16. J. H. Kaufman, S. Metin, and D. D. Saperstein, Phys. Rev. B 39, 13083 (1989).
17. A. Stritwieser, C. H. Heathcock, and E. M. Kosower, in Introduction to Organic Chemistry, 4th ed. (Macmillan, New York, 1992).
18. G. Herzberg, in Infrared and Raman Spectra (Van Nostrand Reinhold, New York, 1945).
19. L. Landau and E. Lifchitz, in Mecanique, Editions en Langues Etrangeres (Moscu, 1960).
20. P. W. Atkins, in Physical Chemistry, 5th ed. (Oxford University Press, Oxford, 1994).
21. Note that O and H do not follow the expected ratio for water, suggesting a more complex reaction with atmospheric oxygen.
22. The simulation used the TRIM software by J. P. B. Biersack and G. L. Haggmark, Nucl. Instrum. Methods 174, 257 (1980). The calculation was performed assuming 5000 H ions of 100 eV energy impinging the surface with an angle of 15° with respect to the normal, as the experimental conditions used in this work.