SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 531-536

Wear-resistant fluorinated diamondlike carbon films

(6) Donnet, C a Fontaine, J a Grill, A b Patel, V b Jahnes, C b Belin, M a

a LABORATOIRE DE TRIBOLOGIE ET DYNAMIQUE DES SYSTÈMES (France)

b IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

Fluorinated diamondlike carbon; Friction; PACVD; Wear

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FRICTION; PROTECTIVE COATINGS; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON WAFERS; STRESS ANALYSIS; TRIBOLOGY; WEAR RESISTANCE;

FLUORINATED DIAMONDLIKE CARBON FILMS; PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION;

AMORPHOUS FILMS;

EID: 0031249934 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00462-3 Document Type: Article

Times cited : (92)

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