Growth kinetics and relationship between structure and mechanical properties of a-C(N):H films deposited in acetylene-nitrogen atmospheres

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 2, 1999, Pages 545-551

  Jacobsohn, L G ^a   Freire Jr , F L ^a   Franceschini, D F ^b   Lacerda, M M ^c   Mariotto, G ^d  

^a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^b FLUMINENSE FEDERAL UNIVERSITY   (Brazil)

^c Northwestern University   (United States)

^d UNIVERSITY OF TRENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033448402     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581641     Document Type: Article

References (28)

1. D. Marton, K. J. Boyd, and J. W. Rabalais, Int. J. Mod. Phys. B 9, 3527 (1995).
2. A. Y. Liu and M. L. Cohen, Science 245, 841 (1989).
3. W. C. Chan, B. Zhou, Y. W. Chung, C. S. Lee, and S. T. Lee. J. Vac. Sci. Technol. A 16, 1907 (1998).
4. D. F. Franceschini, C. A. Achete, and F. L. Freire Jr., Appl. Phys. Lett. 60, 3229 (1992).
5. D. F. Franceschini, F. L. Freire, Jr., and S. R. P. Silva, Appl. Phys. Lett. 68, 2645 (1996).
6. P. Wood, T. Wydeven, and O. Tsugi, Thin Solid Films 258, 151 (1995).
7. F. L. Freire, Jr. and D. F. Franceschini, Thin Solid Films 293, 236 (1997).
8. S. Metin, J. H. Kaufman, D. D. Saperstein, J. C. Scotch, J. Heyman, and E. E. Haller, J. Mater. Res. 9, 396 (1994).
9. S. R. P. Silva, J. Robertson, G. A. J. Amaratunga, B. Raferty, L. M. Brown, J. Schwan, D. F. Franceschini, and G. Mariotto, J. Appl. Phys. 81, 2626 (1997).
10. M. M. Lacerda, D. F. Franceschini, F. L. Freire. Jr., and G. Mariotto, Diamond Relat. Mater. 6, 631 (1997).
11. F. L Freire, Jr., Jpn. J. Appl. Phys., Part 1 36, 4886 (1997).
12. J. Shwan, W. Dworchak, K. Jung, and J. Ehrhardt, Diamond Relat. Mater. 3, 1043 (1994).
13. E. J. Chi, J. Y. Shim, H. K. Baik, and S. M. Lee, Appl. Phys. Lett. 71, 324 (1997).
14. F. L. Freire, Jr., D. F. Franceschini, and C. A. Achete, Nucl. Instrum. Methods Phys. Res. B 85, 268 (1994).
15. W. C. Oliver and G. M. Pharr. J. Mater. Res. 10, 1564 (1992).
16. J. W. Zou, K. Reichelt, K. Schimidt, and B. Dischler, J. Appl. Phys. 65, 3914 (1989).
17. J. W. Zou, H. Schimidt, K. Reichelt, and B. Dischler, J. Appl. Phys. 67, 487 (1990).
18. W. Jacob, Thin Solid Films 326, 1 (1998).
19. K. J. Clay, S. P. Speakman, G. A. J. Amaratunga, and S. R. P. Silva, J. Appl. Phys. 79, 7227 (1996).
20. P. Hammer and W. Gissler, Diamond Relat. Mater. 5, 1152 (1996).
21. S. Todorov, D. Marton, K. J. Boyd, A. H. Al-Bayati, and J. W. Rabelais, J. Vac. Sci. Technol. A 12, 3192 (1994).
22. G. Mariotto, F. L. Freire, Jr., and C. A. Achete, Thin Solid Films 241, 255 (1994).
23. V. Veerasamy, J. Yuan, G. A. J. Amaratunga, W. Milne, K. Gilkes, M. Weiler, and L. Brown, Phys. Rev. B 48, 17954 (1993).
24. F. Wech, J. Widany, and Th. Frauenheim, Phys. Rev. Lett. 78, 3326 (1997).
25. J. H. Kaufman, S. Mettin, and D. D. Saperstein, Phys. Rev. B 39, 13053 (1989).
26. M. Weiler, S. Sattel, T. Giessin, K. Jung, V. Veerasamy, and J. Robertson, Phys. Rev. B 53, 1594 (1996).
27. J. Robertson, Phys. Rev. Lett. 68, 220 (1992).
28. K. R. Lee, K. Y. Eun, and J.-S. Rhee, Mater. Res. Soc. Symp. Proc. 356, 233 (1995).