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Thin Solid Films

Volumn 402, Issue 1-2, 2002, Pages 99-110

Synthesis of amorphous silicon carbonitride films by pulsed laser deposition

(5) Boughaba, S a,b Sproule, G I a McCaffrey, J P a Islam, M a Graham, M J a

a NATIONAL RESEARCH COUNCIL CANADA (Canada)

b NORTEL NETWORKS (United States)

Author keywords

Coatings; Deposition process; Pulsed laser deposition; Silicon carbonitride

Indexed keywords

EXCIMER LASERS; FILM GROWTH; PULSED LASER DEPOSITION; SILICON CARBIDE; SUBSTRATES; SYNTHESIS (CHEMICAL);

ENERGY BANDGAPS;

AMORPHOUS FILMS;

EID: 0036148447 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01673-X Document Type: Article

Times cited : (26)

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