SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 514-518

Formation of crystalline silicon carbon nitride films by microwave plasma-enhanced chemical vapor deposition

(7) Chen, L C a Yang, C Y b Bhusari, D M b Chen, K H a,b Lin, M C c Lin, J C b Chuang, T J b

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

b INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES (Taiwan)

c EMORY UNIVERSITY (United States)

Author keywords

Carbon nitride; Microwave PECVD; Transmission electron diffraction; X Ray photoelectron spectroscopy

Indexed keywords

EID: 0000140081 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(96)80070-7 Document Type: Article

Times cited : (115)

References (26)

1
- 0000092194
- M.L. Cohen, Phys. Rev. B, 32 (1985) 7988.
- (1985) Phys. Rev. B , vol.32 , pp. 7988
- Cohen, M.L.¹

2
- 20444373328
- A.Y. Liu and M.L. Cohen, Science, 245 (1989) 841; Phys. Rev. B, 42 (1990) 10727.
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

3
- 6144285258
- A.Y. Liu and M.L. Cohen, Science, 245 (1989) 841; Phys. Rev. B, 42 (1990) 10727.
- (1990) Phys. Rev. B , vol.42 , pp. 10727

4
- 0020208072
- D.J. Jones and A.D. Steward, Philos. Mag. B, 46, (1982) 423.
- (1982) Philos. Mag. B , vol.46 , pp. 423
- Jones, D.J.¹ Steward, A.D.²

5
- 0001548543
- J.H. Kaufman, S. Metin and D.D. Saperstein, Phys. Rev. B, 39 (1989) 13053.
- (1989) Phys. Rev. B , vol.39 , pp. 13053
- Kaufman, J.H.¹ Metin, S.² Saperstein, D.D.³

6
- 0025521019
- C.J. Torng, J.M. Siversten, J.H. Judy and C. Chang, J. Mater. Res., 5 (1990) 2490.
- (1990) J. Mater. Res. , vol.5 , pp. 2490
- Torng, C.J.¹ Siversten, J.M.² Judy, J.H.³ Chang, C.⁴

7
- 84957284270
- M.Y. Chen, X. Lin, V.P. Dravid, Y.W. Chung, M.S. Wong and W.D. Sproul, Surf. Coat. Technol., 54/55 (1992) 360.
- (1992) Surf. Coat. Technol. , vol.54-55 , pp. 360
- Chen, M.Y.¹ Lin, X.² Dravid, V.P.³ Chung, Y.W.⁴ Wong, M.S.⁵ Sproul, W.D.⁶

8
- 33744682310
- J.F.D. Chubaci, T. Sakai, T. Yamamoto, K. Ogata, A. Abe and F. Fujimoto, Nucl. Instrum. Meth. B, 80/81 (1993) 463.
- (1993) Nucl. Instrum. Meth. B , vol.80-81 , pp. 463
- Chubaci, J.F.D.¹ Sakai, T.² Yamamoto, T.³ Ogata, K.⁴ Abe, A.⁵ Fujimoto, F.⁶

9
- 21544441689
- D. Li, Y.W. Chung, M.S. Wong and W.D. Sproul, J. Appl. Phys., 74 (1993) 219.
- (1993) J. Appl. Phys. , vol.74 , pp. 219
- Li, D.¹ Chung, Y.W.² Wong, M.S.³ Sproul, W.D.⁴

10
- 0027626327
- C. Niu, Y.Z. Lu and C.M. Lieber, Science, 261 (1993) 334.
- (1993) Science , vol.261 , pp. 334
- Niu, C.¹ Lu, Y.Z.² Lieber, C.M.³

11
- 24544461001
- K.M. Yu, M.L. Cohen, E.E. Haller, W.L. Hansen, A.Y. Liu and I.C. Wu, Phys. Rev. B, 49 (1994) 5034.
- (1994) Phys. Rev. B , vol.49 , pp. 5034
- Yu, K.M.¹ Cohen, M.L.² Haller, E.E.³ Hansen, W.L.⁴ Liu, A.Y.⁵ Wu, I.C.⁶

12
- 0029219919
- J.P. Riviere, D. Texier, J. Delafond, M. Jaouen, E.L. Mathe and J. Chaumont, Mater. Lett., 22 (1995) 115.
- (1995) Mater. Lett. , vol.22 , pp. 115
- Riviere, J.P.¹ Texier, D.² Delafond, J.³ Jaouen, M.⁴ Mathe, E.L.⁵ Chaumont, J.⁶

13
- 0000286107
- A.Y. Liu and R.M. Wentzcovitch, Phys. Rev. B, 50 (1994) 10362.
- (1994) Phys. Rev. B , vol.50 , pp. 10362
- Liu, A.Y.¹ Wentzcovitch, R.M.²

14
- 0003142089
- Y. Guo and W.A. Goddard III, Chem. Phys. Lett., 237 (1995) 72.
- (1995) Chem. Phys. Lett. , vol.237 , pp. 72
- Guo, Y.¹ Goddard W.A. III²

15
- 84876791937
- in press
- Z.J. Zhang, S. Fan and C.M. Lieber, Appl. Phys. Lett., in press, and MRS Proc., 388, in press.
- Appl. Phys. Lett.
- Zhang, Z.J.¹ Fan, S.² Lieber, C.M.³

16
- 0041358951
- in press
- Z.J. Zhang, S. Fan and C.M. Lieber, Appl. Phys. Lett., in press, and MRS Proc., 388, in press.
- MRS Proc. , pp. 388

17
- 0018444910
- J.J. Cuomo, P.A. Leary, D. Yu, W. Reuter and M. Frisch, J. Vac. Sci. Technol., 16 (1979) 299.
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 299
- Cuomo, J.J.¹ Leary, P.A.² Yu, D.³ Reuter, W.⁴ Frisch, M.⁵

18
- 4243595887
- B.R. Stoner, G.-H.M. Ma, S.D. Wolter and J.T. Glass, Phys. Rev. B, 45 (1992) 11067.
- (1992) Phys. Rev. B , vol.45 , pp. 11067
- Stoner, B.R.¹ Ma, G.-H.M.² Wolter, S.D.³ Glass, J.T.⁴

19
- 0000997771
- L. Kubler, J.L. Bischoff and D. Bolmont, Phys. Rev. B, 38 (1988) 13113.
- (1988) Phys. Rev. B , vol.38 , pp. 13113
- Kubler, L.¹ Bischoff, J.L.² Bolmont, D.³

20
- 0000797707
- A. Hoffman, R. Brener, I. Gouzman, C. Cytermann, H. Geller, L. Levin and M. Kenny, Diamond Rel. Mater., 4 (1995) 292.
- (1995) Diamond Rel. Mater. , vol.4 , pp. 292
- Hoffman, A.¹ Brener, R.² Gouzman, I.³ Cytermann, C.⁴ Geller, H.⁵ Levin, L.⁶ Kenny, M.⁷

21
- 0027885044
- S. Kumar and T.L. Tansley, Solid State Commun., 88 (1993) 803.
- (1993) Solid State Commun. , vol.88 , pp. 803
- Kumar, S.¹ Tansley, T.L.²

22
- 36449009256
- A. Bousetta, M. Lu and A. Bensaoula, Appl. Phys. Lett., 65 (1994) 696.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 696
- Bousetta, A.¹ Lu, M.² Bensaoula, A.³

23
- 0028481878
- H.W. Song, F.Z. Cui, X.M. He, W.Z. Li and H.D. Li, J. Phys.: Condens. Matter, 6 (1994) 6125.
- (1994) J. Phys.: Condens. Matter , vol.6 , pp. 6125
- Song, H.W.¹ Cui, F.Z.² He, X.M.³ Li, W.Z.⁴ Li, H.D.⁵

24
- 12044253618
- D. Marton, K.J. Boyd, A.H. Al-Bayati, S.S. Todorov and J.W. Rabalais, Phys. Rev. Lett., 73 (1994) 118.
- (1994) Phys. Rev. Lett. , vol.73 , pp. 118
- Marton, D.¹ Boyd, K.J.² Al-Bayati, A.H.³ Todorov, S.S.⁴ Rabalais, J.W.⁵

25
- 0041742046
- J.H. Scofield, J. Electr. Spectr. Relat. Phenom., 8 (1976) 129.
- (1976) J. Electr. Spectr. Relat. Phenom. , vol.8 , pp. 129
- Scofield, J.H.¹

26
- 0017535897
- W. Kern and R.S. Rosler, J. Vac. Sci. Technol., 14(5) (1977) 1082.
- (1977) J. Vac. Sci. Technol. , vol.14 , Issue.5 , pp. 1082
- Kern, W.¹ Rosler, R.S.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.