SiCN alloys deposited by electron cyclotron resonance plasma chemical vapor deposition

Applied Physics Letters

Volumn 69, Issue 6, 1996, Pages 773-775

  Gomez F J ^a   Prieto, P ^a   Elizalde, E ^a   Piqueras, J ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037967607     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117887     Document Type: Article

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