Comparison of quantum-mechanical capacitance-voltage simulators

IEEE Electron Device Letters

Volumn 22, Issue 1, 2001, Pages 35-37

  Richter, C A ^a   Hefner, A R ^a   Vogel, E M ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; DIELECTRIC DEVICES; GATES (TRANSISTOR); POLYSILICON; QUANTUM THEORY; THICKNESS MEASUREMENT; ULTRATHIN FILMS; VOLTAGE MEASUREMENT;

CAPACITANCE VOLTAGE ANALYSIS; POLYSILICON DEPLETION; QUANTUM MECHANICAL SIMULATOR; ULTRATHIN GATE DIELECTRICS;

MOS DEVICES;

EID: 0035124973     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.892436     Document Type: Article

References (11)

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