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Volumn 87, Issue 3, 2001, Pages 303-316

The formation of ordered, ultrathin SiO2/Si(1 0 0) interfaces grown on (1 × 1) Si(1 0 0)

(9) Herbots, N a Shaw, J M a Hurst, Q B a Grams, M P a Culbertson, R J a Smith, David J a Atluri, V b Zimmerman, P b Queeney, K T c

a ARIZONA STATE UNIVERSITY (United States)

b INTEL CORPORATION (United States)

c LUCENT TECHNOLOGIES (United States)

Author keywords

Amorphous surface; Crystalline interfaces; Ion beam analysis; Ion channeling; Nuclear resonance; Silicon oxide; SiO2 Si (100)

Indexed keywords

CHEMICAL BONDS; CHEMICAL CLEANING; FILM GROWTH; INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON; STOICHIOMETRY; SUBSTRATES; THERMOOXIDATION; ULTRATHIN FILMS;

ION BEAM ANALYSIS (IBA);

SILICA;

EID: 0035915287 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(01)00729-2 Document Type: Article

Times cited : (27)

References (56)

1
- 34547477575
- (1987) Phys. Rev. Lett. , vol.59 , Issue.2 , pp. 213
- Ourmazd, A.¹ Taylor, D.W.² Rentschler, J.A.³ Beuk, J.⁴

2
- 0032669575
- (1999) Mater. Sci. Semicond. Process. , vol.2 , Issue.2 , pp. 103
- Diebold, A.C.¹ Venables, D.² Chabal, Y.³ Muller, D.⁴ Weldon, M.⁵ Garfunkel, E.⁶

3
- 0002933460
- (1987) Phys. Rev. Lett. , vol.58 , Issue.3 , pp. 282
- Fan, G.Y.¹ Cowley, J.M.² Spence, J.C.H.³

4
- 21544465655
- (1987) J. Appl. Phys. , vol.61 , Issue.2 , pp. 629
- Grunthaner, P.J.¹ Hecht, M.H.² Grunthaner, F.J.³ Johnson, N.M.⁴

5
- 45249126098
- (1989) Thin Solid Films , vol.183 , pp. 197
- Grunthaner, P.J.¹ Grunthaner, F.J.² Fathauer, R.W.³ Lin, T.L.⁴ Hecht, M.H.⁵ Bell, L.D.⁶ Kaiser, W.J.⁷ Schowengerdt, F.D.⁸ Mazur, J.H.⁹

6
- 0001706688
- (2000) Phys. Rev. Lett. , vol.84 , Issue.19 , pp. 4393
- Tu, Y.¹ Tersoff, J.²

7
- 0001743010
- (2000) Phys. Rev. Lett. , vol.84 , Issue.5 , pp. 943
- Buczko, R.¹ Pennycook, S.J.² Pantelides, S.T.³

8
- 12844285514
- (2000) Phys. Rev. Lett. , vol.85 , Issue.6 , pp. 1298
- Neaton, J.B.¹ Muller, D.A.² Ashcroft, N.W.³

9
- 0032614424
- (1999) Appl. Phys. Lett. , vol.74 , Issue.14 , pp. 2005
- Lucovsky, G.¹ Wu, Y.² Niimi, H.³ Misra, V.⁴ Phillips, J.C.⁵

10
- 85166368434
- (1990) J. Vac. Sci. Technol. , vol.B17 , Issue.4 , pp. 1803
- Phillips, J.C.¹

11
- 0034186964
- (2000) J. Vac. Sci. Technol. , vol.B18 , Issue.3 , pp. 1742
- Lucovsky, G.¹ Yang, H.² Niimi, H.³ Keister, J.W.⁴ Rowe, J.E.⁵ Thorpe, M.F.⁶ Phillips, J.C.⁷

12
- 21544433109
- (1990) Appl. Phys. Lett. , vol.56 , Issue.7 , pp. 656
- Higashi, G.S.¹ Chabal, Y.J.² Trucks, G.W.³ Raghavachari, K.⁴

13
- 36549099751
- (1988) Appl. Phys. Lett. , vol.53 , Issue.11 , pp. 998
- Burrows, V.A.¹ Chabal, Y.J.² Higashi, G.S.³ Raghavachari, K.⁴ Christman, S.B.⁵

14
- 0014800514
- (1970) RCA Rev. , vol.31 , pp. 187
- Kern, W.¹

15
- 85166380280
- (1983) Curr. Cont./Eng. Technol. Appl. , vol.11 , pp. 18
- Kern, W.¹

16
- 0346715727
- (2000) J. Appl. Phys. , vol.87 , Issue.8 , pp. 3700
- Le Thanh, V.¹ Bouchier, D.² Hincelin, G.³

17
- 0034350341
- (2000) J. Vac. Sci. Tech. , vol.A18 , Issue.5 , pp. 2542
- Bok, T.H.¹ Ye, J.H.² Li, S.F.Y.³

18
- 36549104683
- (1989) J. Appl. Phys. , vol.66 , Issue.1 , pp. 419
- Fenner, D.B.¹ Biegelsen, D.K.² Bringans, R.D.³

19
- 0030565103
- (1996) Nucl. Instr. Meth. Phys. Res. , vol.B118 , pp. 144-150
- Atluri, V.¹ Herbots, N.² Dagel, D.³ Bhagvat, S.⁴ Whaley, S.⁵

20
- 85166370632
- Mater. Res. Soc. Symp. Proc., G.S. Higashi, M. Hirose, S. Raghavan, S. Verhaeverbeke (Eds.)
- (1998) Science and Technology of Semiconductor Surface Preparation , vol.477 , pp. 281
- Atluri, V.¹ Herbots, N.² Dagel, D.³ Jacobsson, H.⁴ Johnson, M.⁵ Carpio, R.⁶ Fowler, B.⁷

21
- 85166372928
- Ph.D. Thesis, University of Arizona and Arizona State University
- (1998) Hydrogen passivation of Si(1 0 0) used as templates for low temperature epitaxy & oxidation
- Atluri, V.¹

22
- 85166378741
- US patent filed
- Herbots, N.¹ Atluri, V.² Xiang, J.³ Bradley, J.D.⁴ Banerjee, S.⁵ Hurst, Q.B.⁶

23
- 0002933909
- Mater. Res. Soc. Symp. Proc., S. Ashok, J. Chevallier, K. Sumino, B.L. Soppori, W. Goetz, R.C. Bowman (Eds.)
- (1999) Defect and Impurity Engineered Semiconductors and Devices II , vol.510 , pp. 157
- Herbots, N.¹ Atluri, V.² Hurst, Q.³ Shaw, J.M.⁴ Banerjee, S.⁵ Bradley, J.D.⁶ Culbertson, R.J.⁷ Smith, D.J.⁸

24
- 85166377663
- Mater. Res. Soc. Symp. Proc., N.H. Nickel, W.B. Jackson, R.C. Bowman (Eds.)
- (1999) Hydrogen in Semiconductors and Metals , vol.513 , pp. 399
- Atluri, V.¹ Herbots, N.²

25
- 0003074699
- Mater. Res. Soc. Symp. Proc., H.R. Huff, M.L. Green, T. Hattori, G. Lucovsky, C.A. Richter (Eds.)
- (2000) 2 and High-K Materials for ULSI Gate Dielectrics , vol.567 , pp. 183
- Hurst, Q.B.¹ Herbots, N.² Shaw, J.M.³ Floyd, M.M.⁴ Smith, D.J.⁵ Culbertson, R.J.⁶ Grams, M.P.⁷ Bradley, J.D.⁸ Zimmerman, P.⁹ Atluri, V.¹⁰

26
- 21544438943
- (1991) Appl. Phys. Lett. , vol.59 , Issue.6 , pp. 685
- Eaglesham, D.J.¹ Higashi, G.S.² Cerullo, M.³

27
- 85166375177
- (1998) Proceedings of the Research Experience for Undergraduates at Arizona State University , pp. 100
- Grams, M.P.¹

28
- 85166373445
- note

29
- 0025232926
- (1990) Nucl. Inst. Meth. , vol.B44 , pp. 260
- Leavitt, J.A.¹ McIntyre L.C., Jr.² Ashbaugh, M.D.³ Oder, J.G.⁴ Lin, Z.⁵ Dezfouly-Arjomandy, B.⁶

30
- 85166367877
- Ph.D. Thesis, Arizona State University
- (2000)
- Hurst, Q.B.¹

31
- 85166370494
- M.Sc. Thesis, Arizona State University
- 2001
- Shaw, J.M.¹

32
- 85166380600
- unpublished results
- Herbots, N.¹ Shaw, J.M.² Hurst, Q.B.³ Culbertson, R.J.⁴ Smith, D.J.⁵

33
- 0000269564
- (2000) J. Appl. Phys. , vol.87 , Issue.3 , pp. 1322-1330
- Queeney, K.T.¹ Weldon, M.K.² Chang, J.P.³ Chabal, Y.J.⁴ Gurevich, A.B.⁵ Sapjeta, J.⁶ Opila, R.L.⁷

34
- 85166379887
- M.Sc. Thesis, Arizona State University
- (1998)
- Banerjee, S.¹

35
- 0002987441
- (1994) Appl. Phys. Lett. , vol.65 , Issue.9 , pp. 1133
- Hao, M.Y.¹ Lai, K.F.² Chen, W.M.³ Lee, J.C.⁴

36
- 0032516989
- (1998) Appl. Phys. Lett. , vol.73 , Issue.11 , pp. 1517
- Alers, G.B.¹ Werder, D.J.² Chabal, Y.³ Lu, H.C.⁴ Gusev, E.P.⁵ Garfunkel, E.⁶ Gustafsson, T.⁷ Urdahl, R.S.⁸

37
- 85166367623
- Intel Corporation, private communication
- (1998)
- Zimmerman, P.J.¹

38
- 0343832016
- (2000) Electrochim. Acta , vol.45 , Issue.28 , pp. 4591
- Allongue, P.¹ De Villeneuve, C.H.² Morin, S.³ Boukherroub, R.⁴ Wayner, D.D.M.⁵

39
- 0000713123
- (2001) Appl. Phys. Lett. , vol.78 , Issue.3 , pp. 309
- Sakaue, H.¹ Fujiwara, S.² Shingubara, S.³ Takasago, T.⁴

40
- 0003008929
- (1994) Appl. Phys. Lett. , vol.65 , Issue.18 , pp. 2344
- Copel, M.¹ Culbertson, R.J.² Tromp, R.M.³

41
- 0033600230
- (1999) Nature , vol.399 , pp. 758
- Muller, D.A.¹ Sorsch, T.² Moccio, S.³ Baumann, F.H.⁴ Evans-Lutterodt, K.⁵ Timp, G.⁶

42
- 85166380508
- Mater. Res. Soc. Symp. Proc., L. Clevenger, S.A. Campbell, B. Herner, J. Kittl, P.R. Besser (Eds.), in press
- Gate Stack and Silicide Issues in Silicon Processing , vol.611
- Baumann, F.H.¹ Chang, C.-P.² Grazul, J.L.³ Kamgar, A.⁴ Liu, C.T.⁵ Muller, D.A.⁶

43
- 0003006211
- Mat. Res. Soc. Symp. Proc., J.M. Gibson, L.R. Dawson (Eds.)
- (1984) Layered Structures, Epitaxy, and Interfaces , vol.37 , pp. 193
- Liliental, Z.¹ Krivanek, O.L.² Goodnick, S.M.³ Wilmsen, C.W.⁴

44
- 0001275769
- (1985) Phys. Rev. , vol.B32 , pp. 8171
- Goodnick, S.M.¹ Ferry, D.K.² Wilmsen, C.W.³ Liliental, Z.⁴ Fathy, D.⁵ Krivanek, O.L.⁶

45
- 0003987941
- Academic Press, New York
- (1982) Materials Analysis by Ion Channeling
- Feldman, L.C.¹ Picraux, S.T.²

46
- 0003944822
- North Holland, New York
- (1986) Fundamentals of Surface and Thin Film Analysis
- Feldman, L.C.¹ Mayer, J.W.² Picraux, S.T.³

47
- 0003074996
- (1979) Appl. Phys. Lett. , vol.35 , pp. 859
- Cheung, N.¹ Feldman, L.C.² Silverman, P.J.³ Sternsgaard, I.⁴

48
- 85025753717
- (1980) Surf. Sci. , vol.100 , pp. 35
- Jackman, T.E.¹ MacDonald, J.R.² Feldman, L.C.³ Silverman, P.J.⁴ Stensgaard, I.⁵

49
- 0030565165
- (1996) Nucl. Inst. Meth. , vol.B118 , pp. 493
- Stedile, F.C.¹ Baumvol, I.J.R.² Oppenheim, I.F.³ Trimaille, I.⁴ Ganem, J.-J.⁵ Rigo, S.⁶

50
- 0000981542
- (1986) Surf. Sci. , vol.167 , pp. 127
- Culbertson, R.J.¹ Kuk, Y.² Feldman, L.C.³

51
- 85166366242
- unpublished results
- Queeney, K.T.¹ Herbots, N.²

52
- 0001743010
- (2000) Phys. Rev. Lett. , vol.84 , Issue.5 , pp. 943
- Buczko, R.¹ Pennycook, S.J.² Pantelides, S.T.³

53
- 0033752210
- (2000) Microelectr. Realiability , vol.40 , pp. 841
- Schroeder, T.¹ Adelt, M.² Richter, B.³ Naschitzki, M.⁴ Baumer, M.⁵ Freund, H.-J.⁶

54
- 0033809240
- (2000) Surf. Rev. Lett. , vol.7 , Issue.1-2 , pp. 7
- Schroeder, T.¹ Adelt, M.² Richter, B.³ Naschitzki, M.⁴ Baumer, M.⁵ Freund, H.-J.⁶

55
- 85166372978
- in press
- Solid State Electr.
- Schroeder, T.¹ Hammoudeh, A.² Pykavy, M.³ Magg, N.⁴ Adelt, M.⁵ Baumer, M.⁶ Freund, H.-J.⁷

56
- 1642393102
- (1988) J. Appl. Phys. , vol.64 , Issue.9 , pp. 4454
- Hahn, S.¹ Ponce, F.A.² Tiller, W.A.³ Stojanoff, V.⁴ Bulla, D.A.P.⁵ Castro W.E., Jr.⁶

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