Atomic-scale defect control on hydrogen-terminated silicon surface at wafer scale

Applied Physics Letters

Volumn 78, Issue 3, 2001, Pages 309-311

  Sakaue, Hiroyuki ^a   Fujiwara, Shinya ^a   Shingubara, Shoso ^a   Takahagi, Takayuki ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000713123     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1339993     Document Type: Article

References (11)

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