Transmission electron microscopy observation of thin foil specimens prepared by means of a focused ion beam

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2522-2527

  Saka, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000272399     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590202     Document Type: Article

References (17)

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