Investigations on the topology of structures milled and etched by focused ion beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3996-3999

  Lipp, S ^a   Frey, L ^b   Lehrer, C ^a   Frank, B ^a   Demm, E ^c   Ryssel, H ^a,b  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^c SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001398692     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588630     Document Type: Article

References (8)

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7. A. J. Leslie, K. L. Pey, K. S. Sim, M. T. F. Beh, and G. P. Goh, ISTFA '95 (unpublished), p. 353.
8. S. Lipp, L. Frey, G. Franz, E. Demm, S. Petersen, and H. Ryssel, Nucl. Instrum. Methods Phys. Res. B 106, 620 (1995).