Application of layout overlay for failure analysis

Microelectronics Reliability

Volumn 38, Issue 6-8, 1998, Pages 987-992

  Burmer, C ^a   Gorlich S ^a   Pauthner, S ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL POLISHING; COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; CORRELATION METHODS; FAILURE ANALYSIS; ION BEAMS;

AUTOROUTING DESIGN TECHNIQUES; FOCUSED ION BEAMS (FIB);

INTEGRATED CIRCUIT LAYOUT;

EID: 0032084070     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00075-4     Document Type: Article

References (8)

1. St. Cocina, et al.: "Software Integration in a Workstation-Based E-Beam Tester", Proc. ITC (1986) 644 - 649
2. FEI Company "Focussed Ion Beam xP Workstation", User's Guide, Chapter 6 (1996)
3. Micrion Corporation : "Micrion-Knights Software Reference Manual", (7/21/97)
4. "Merlin's Framework Users' Manual" Knights Technology, Inc. (1997)
5. "Equipment Independent Image Overlay" Application Note, Knights Technology, Inc. (1997)
6. S. S. Lee, J. S. Seo, N.S. Cho, S. Daniel: "Application of Backside Photo and Thermal Emission Microscopy Techniques to Advanced memory Devices", Proc. ISTFA (1997) 63 - 66
7. K. Naith, T. Ishii, J.I. Mitsuhashi: "Investigation of Multilevel Metallization ULSI by Light Emission from Back-Side and Front-Side of the Chip", Proc. ISTFA (1997) 145 - 151
8. N Kuji, T.Takeda: "Automated Placement of Testing Pads for Electron-Beam Observation", Proc. ESREF (1997), Microelectron Reliab.37 (1997) 1565-1568