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Volumn 12, Issue 11, 2000, Pages 3306-3315

Low-temperature fabrication of Si thin-film transistor microstructures by soft lithographic patterning on curved and planar substrates

(4) Erhardt, M K a,b Jin, H C b Abelson, J R b Nuzzo, R G a,b

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

b University of Illinois at Urbana Champaign (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POLYMER; SILICON; SILICON NITRIDE;

ARTICLE; CHEMICAL STRUCTURE; FILM; LOW TEMPERATURE; MATERIALS; SEMICONDUCTOR;

EID: 0034515332 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm000480t Document Type: Article

Times cited : (22)

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